JPH041730Y2 - - Google Patents

Info

Publication number
JPH041730Y2
JPH041730Y2 JP1982164864U JP16486482U JPH041730Y2 JP H041730 Y2 JPH041730 Y2 JP H041730Y2 JP 1982164864 U JP1982164864 U JP 1982164864U JP 16486482 U JP16486482 U JP 16486482U JP H041730 Y2 JPH041730 Y2 JP H041730Y2
Authority
JP
Japan
Prior art keywords
reaction tube
substrate
reaction
substrates
large number
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982164864U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5970333U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16486482U priority Critical patent/JPS5970333U/ja
Publication of JPS5970333U publication Critical patent/JPS5970333U/ja
Application granted granted Critical
Publication of JPH041730Y2 publication Critical patent/JPH041730Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)
JP16486482U 1982-10-29 1982-10-29 プラズマ化学気相生成装置 Granted JPS5970333U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16486482U JPS5970333U (ja) 1982-10-29 1982-10-29 プラズマ化学気相生成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16486482U JPS5970333U (ja) 1982-10-29 1982-10-29 プラズマ化学気相生成装置

Publications (2)

Publication Number Publication Date
JPS5970333U JPS5970333U (ja) 1984-05-12
JPH041730Y2 true JPH041730Y2 (en]) 1992-01-21

Family

ID=30361335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16486482U Granted JPS5970333U (ja) 1982-10-29 1982-10-29 プラズマ化学気相生成装置

Country Status (1)

Country Link
JP (1) JPS5970333U (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5456366A (en) * 1977-10-14 1979-05-07 Hitachi Ltd Plasma film forming apparatus
JPS5673428A (en) * 1979-11-21 1981-06-18 Canon Inc Method of forming film
JPS5694037U (en]) * 1979-12-20 1981-07-25

Also Published As

Publication number Publication date
JPS5970333U (ja) 1984-05-12

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